電子束聚焦偏轉(zhuǎn)系統(tǒng)中透鏡和偏轉(zhuǎn)器不對中裝配誤差效應(yīng)的數(shù)值計算
NUMERICAL COMPUTATION OF MISALIGNMENT ASSEMBLING ERROR EFFECT OF LENSES AND DEFLECTORSIN ELECTRON BEAM FOCUSING ANDDEFLECTION SYSTEMS
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摘要: 本文討論了透鏡和偏轉(zhuǎn)器在電子束系統(tǒng)中不對中裝配造成的電子光學(xué)性質(zhì)影響的數(shù)值計算問題,包括推導(dǎo)出不對中的透鏡和偏轉(zhuǎn)器在系統(tǒng)中的電磁場表示式,電子軌跡方程及象差積分式等。根據(jù)這些公式所編制的計算機(jī)程序已用來計算了若干個實例,從中可見不對中誤差效應(yīng)的數(shù)值計算對于設(shè)計和裝配電子束聚焦偏轉(zhuǎn)系統(tǒng)起到指導(dǎo)性的作用。Abstract: The misalignment assembling error effect of lenses and deflectors and its evaluation in electron beam focusing and deflection systems are discussed. First the electrostatic and magnetic field expression in electron beam systems due to the misaligned lenses and deflectors are derived. Then the formulae for evaluating the changes of the optical properties caused by the misalignment assembling errors (i.e. the additional image shifting and additional aberrations) are given by the derived field expression and the general ray equation. A set of programs based on the fromulae given is developed, and some illustrative examples are also shown as the spot-diagrams. It can be reflected that the numerical computation of the misalignment assembling error effect plays important role in both designing and assembling electron beam focusing and deflection systems.
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H. C. Chu, E.Munro, Optik, 61(1982)2, 121. -
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