電子束聚焦和偏轉(zhuǎn)系統(tǒng)中動(dòng)態(tài)修正的計(jì)算
THE COMPUTATION OF DYNAMIC CORRECTION IN ELECTRON BEAM FOCUSING AND DEFLECTION SYSTEMS
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摘要: 在電子束聚焦和偏轉(zhuǎn)系統(tǒng)中動(dòng)態(tài)修正方法(即用場(chǎng)曲校正透鏡和消象散器來(lái)消除偏轉(zhuǎn)場(chǎng)曲和象散)可以相當(dāng)顯著地減小系統(tǒng)的總象差和提高系統(tǒng)的電子光學(xué)性能。本文討論了動(dòng)態(tài)修正的計(jì)算問(wèn)題:包括場(chǎng)曲校正透鏡和消象散器的工作原理;校正透鏡和消象散器電磁場(chǎng)分布的計(jì)算;完全消除場(chǎng)曲和象散在校正透鏡和消象散器上所加信號(hào)強(qiáng)度的計(jì)算;以及校正透鏡和消象散器對(duì)畸變的影響。通過(guò)文章給出動(dòng)態(tài)修正計(jì)算的實(shí)例可見(jiàn)動(dòng)態(tài)修正對(duì)提高系統(tǒng)的電子光學(xué)性能起著很大的作用。
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關(guān)鍵詞:
Abstract: In electron focusing and deflection systems the method of dynamic correction (i.e. the application of field curvature correction lenses and stigmators) can significantly reduce the overall aberration and greatly improve the optical properties of systems. In this paper the following numerical computation problems of dynamic correction are described: (1) the principle of correction lenses and stigmators; (2) the computation of field distributions in electrostatic and magnetic correction lenses and stigmators;(3) the calculation of the signal strengths applied in correction lenses and stigmators which completely cancel field curvature and stigmatism; (4) the effect of correction lenses and stigmators on distortion. From the examples of computation of dynamic correction given in this paper it can be seen that the dynamic correction plays enormous role in improving the electron optical properties. -
K. Kanaya and N. Baba, J. Phys. E: Sci. Instrum., 13(1980),415.[2]G. Owen, J. Vac. Sci, Techn., 19(1981), 1064.[3]Ximen Jiye and Li Yu, Optik.,62(1982), 287.[4]E. Munro and H. C. Chu, ibid., 60(1982), 371.[5]E. Munro and H. C. Chu, ibid., 61(1982), 1.[6]H, C. Chu and E. Munro, ibid., 61(1982), 121.[7]H. C. Chu and E. Munro, ibid., 61(1982), 213.[8]E. Munro, Image Processing and Computer-Aided Design on Electron Optics, ed. by P. W. Hawkes, 1974,p. 284. -
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