一種計算熱陰極蒸發(fā)率的方法
A METHOD OF CALCULATING EVAPORATION RATE FOR THERMIONIC CATHODES
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摘要: 正 (一)引言 用晶體振蕩法測量陰極蒸發(fā)率,一般是把陰極當作點蒸發(fā)源。這可能是為了便于計算蒸發(fā)率。在其它報道,例如文獻[3]中,陰極則被當作是平面元蒸發(fā)源,蒸發(fā)物接受器被當作是陰極面法向上某處的一個平面元。 本文采取有效措施克服了晶體因溫度變化引起的振蕩頻率漂移(晶體諧振頻率漂移)對測量蒸發(fā)率的影響。這不僅提高了測量蒸發(fā)物引起的振蕩頻率變化(晶體諧振頻率變
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關鍵詞:
Abstract: An improved method using crystal oscillator for measuring the evaporation rate of ca-thodes is proposed, in which the distance between the crystal (substrate) and the cathode (source) is smaller than usually maintained. Thus more evaporation products from the cathode can be received by the crystal, and consequently the method can be used for measuring lower evaporation rate. Formulae for calculating the evaporation rate are derived, and the precision of the these is given. In this paper a method to prevent the resonant frequency change caused by the change of temperature is also given. The experimental result shows that one Hertz resonant frequency shift can be detected while the oscillation frequency is 5 MHz. -
Standard Recommended Practice for Measurement of Sublimation from Thermionic Emitters, ASTM Standards, F53-68 (Reapproved 1978), 274-281.[3]W. C. Rutledge, A.Milch and E. S. Rittner, J.Appl. Phys., 29(1958), 834.[4]王竹溪著,統(tǒng)計物理學導論,人民教育出版社,1961年,第189頁.[5]В.Ф.Коваленко著,旭光電子管廠情報室譯,熱物理過程和電真空器件,國防工業(yè)出版社,1981年,第100頁.[6]L. Holland編,薄膜微電子學翻譯組譯,薄膜微電子學,國防工業(yè)出版社,1971年,第194, 223頁.[7]K. H. Behrndt and R. W. Love, Vacuum, 12(1962), 1.[8]G. Sauerbrey, Z. Physik, 155(1959), 206. -
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