大面積鍺光電接收器的特性測量
CHARACTERISTICS OF LARGE AREA GERMANIUM PHOTODIODE
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摘要: 本文介紹了大面積鍺光電接收器的光譜響應、量子效率、頻率特性和I-V特性的測量方法。在波長為1.3m處,響應度為0.47 A/W,量子效率為45％,頻率響應為100kHz。在反向偏壓為 5V,溫度為12℃時,反向漏電流(以電流密度表示)為 2310-6A/cm2(直徑為 7.5mm)。在1060℃變溫范圍內,測定了接收器的I-V溫度特性和暗電流與溫度的關系。最后對測試系統和實驗現象進行了初步討論。
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關鍵詞:
Abstract: A fabrication procedure for large area germanium photodiodes has been demonstrated and the measuring methods on characteristics of spectral response, quantum efficiency, fre-quency response and I-V for this device have been described. At 1.3 m wavelength, the responsibility and the quantum efficiency are 0.47 A/W and 45%, respectively. The frequ-ency response of large area germanium photodiodes is about 100kHz. When bias voltage VB is in the range of 5V at room temperature (12℃), the dark current density of the fabricated diodes is 2310-6 A/cm2(=7.5mm). Typical dark current and I-V dependences on temperature were studied for the large area germanium photodiodes in the range of 2026℃. We have also analysed and discussed these experimental results. -
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