微機械陀螺振動特性的等效電學(xué)模擬
Equivalent electrical simulation of micromachined gyroscope\s oscillating properties
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摘要: 根據(jù)微機械陀螺的動力學(xué)方程建立其振動特性的等效電路模型,該模型用電路模擬工具PSPICE實現(xiàn)。利用這個電路模型,可以分析陀螺的振動特性,包括檢測振動的瞬態(tài)響應(yīng)和穩(wěn)態(tài)響應(yīng),檢測振動對輸入角速度的頻率響應(yīng)特性,從而可以獲得陀螺工作的優(yōu)化條件;并為傳感器與接口電路的整體模擬打下基礎(chǔ)。
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關(guān)鍵詞:
- 微機械陀螺; 等效電路模型; 模擬
Abstract: An equivalent circuit model of micromachined gyroscope s oscillating properties is derived according to its dynamics equation. The model is implemented with the circuit simulation tool PSPICE, and can be used to analyse oscillating properties, including the detection mode transient response, stable response and frequency response to angular rate. Thus the optimizing conditions can be gotten. And also the model enables the sensor to simulate together with the interfacing electronics. -
B.L. Lee, S. S. Baek, H. S. Kim, et al., A tunable vibratory microgyroscope, Sensors and Actuators A, 1998, 64(1), 51-56.[2]T. Veijola, Accelerometer model in APLAC, Tech. Rep. CT-18, Helsinki University of Technology,Circuit Theory Laboratory, Feb. 1994.[3]T. Veijola, H. Kuisma, J. Lahdenpera, et al., Equivalent circuit model of the squeezed gas film in a silicon accelerometer, Sensors and Actuators A, 1995, 48(3), 239-248.[4]熊幸果,微機械梳狀電容式加速度傳感器及梳狀振動式陀螺研究,[博士論文],上海,中國科學(xué)院上海冶金研究所,1999[5]黃小振,電容式振動微機械陀螺接口電路的設(shè)計、模擬與測試,[碩士論文],上海,中國科學(xué)院上海冶金研究所,2001. -
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