七級偏轉象差中的Trilemma效應
THE TRILEMMA EFFECT IN SEVENTH-ORDER DEFLECTION ABERRATION
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摘要: Trilemma效應是偏轉系統(tǒng)實現(xiàn)自會聚的一個重要判據(jù),對高級偏轉象差的校正,需要考慮高階Trilemma效應的影響,本文從多極場偏轉象差校正理論出發(fā),應用區(qū)域分割的方法,對直至七階的Trilemma效應進行了分析,給出了各階Trilemma常數(shù)的表達式,其中七階Trilemma常數(shù)可以作為大偏轉角偏轉象差校正的判據(jù)。Abstract: Trilemma effect is an important criteria for the self-convergence deflection system. The influence of the higher order Trilemma effects should be taken into account for the correction of the higher-order deflection aberrations. In this paper, up to the seventh-order Trilemma effects are analyzed with region-cutting by means of the correction theory of the multipole field deflection aberration. The expressions of the various order of Trilemma constant are given, in which the seventh-order Trilemma constant can be used as a criteria of the deflection aberration correction at large deflection angle
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