微型電場傳感器在工頻電場測量中的應用研究

仝杰; 雷煜卿; 劉國華; 王鶴; 金學明; 楊鵬飛; 彭春榮

doi:10.11999/JEIT180217

微型電場傳感器在工頻電場測量中的應用研究

doi: 10.11999/JEIT180217 cstr: 32379.14.JEIT180217

仝杰¹,
雷煜卿¹,
劉國華^{2, 3},
王鶴^{2, 3},
金學明^{2, 3},
楊鵬飛^4, ,,
彭春榮⁴

1.
中國電力科學研究院有限公司 ??北京 ??100192
2.
北京智芯微電子科技有限公司電力芯片設計分析實驗室 ??北京 ??100192
3.
北京智芯微電子科技有限公司北京市電力高可靠性集成電路設計工程技術研究中心 ??北京 ??100192
4.
北京中科飛龍傳感技術有限責任公司 ??北京 ??100083

基金項目: 國家發(fā)展改革委物聯(lián)網(wǎng)技術研發(fā)及產(chǎn)業(yè)化專項(發(fā)改辦高技〔2012〕2766號)；國家電網(wǎng)公司總部科技項目(SGJSDK00ZPJS1600203)

詳細信息

作者簡介:
仝杰：男，1983年生，高級工程師，研究方向為電力智能設備與傳感技術

雷煜卿：男，1975年生，高級工程師，研究方向為電力系統(tǒng)通信及傳感技術

楊鵬飛：男，1986年生，博士后，研究方向為MEMS傳感器設計與加工、低頻電磁場探測、大氣電場探測、工頻電場檢測等

通訊作者:
楊鵬飛　 yang330650591@126.com

中圖分類號: TP212.1
計量
- 文章訪問數(shù): 2548
- HTML全文瀏覽量: 836
- PDF下載量: 75
- 被引次數(shù): 0
出版歷程
- 收稿日期: 2018-03-07
- 修回日期: 2018-08-14
- 網(wǎng)絡出版日期: 2018-08-23
- 刊出日期: 2018-12-01

Power-frequency Electric Field Measurement Using a Micromachined Electric Field Sensor

Jie TONG¹,
Yuqing LEI¹,
Guohua LIU^{2, 3},
He WANG^{2, 3},
Xueming JIN^{2, 3},
Pengfei YANG^{4
, ,},
Chunrong PENG⁴

1.
China Electric Power Research Institute, Co., Ltd., Beijing 100192, China
2.
State Grid Key Laboratory of Power Industrial Chip Design and Analysis Technology, Beijing Smart-Chip Mircroelectronics Technology Co., Ltd., Beijing 100192, China
3.
Beijing Engineering Research Center of High-reliability IC with Power Industrial Grade, Beijing Smart-Chip Microelectronics Tchnology Co., Ltd., Beijing 100192, China
4.
Beijing TFlying Transducer Technology Co., Ltd., Beijing 100083, China

Funds: The Special Fund of National Development and Reform Commission for IoT R&D and Industrialization (NDRC High-Tec (2012) 2766), The Headquarter Science and Technology Fund of State Grid Corporation of China (SGJSDK00ZPJS1600203)

摘要

摘要: 該文基于高性能的MEMS電場敏感芯片研制出一種新型的工頻電場測量系統(tǒng)。針對芯片調(diào)制被測電場后其輸出信號的特征，采用正交相關檢測原理提出一種可抑制背景干擾噪聲的工頻電場解調(diào)算法，設計出小型化、空間分辨力高的工頻電場測量探頭，并在基礎上提出MEMS工頻電場測量系統(tǒng)的系統(tǒng)級設計方案，成功實現(xiàn)了MEMS電場敏感芯片輸出信號的無線采集、濾波、以及電場信號的高精度解調(diào)。高壓輸電線路下工頻電場測量結果表明，MEMS工頻電場測量系統(tǒng)與傳統(tǒng)電場測量儀的測量結果具有良好的一致性。
- 電場傳感器 /
- 工頻電場 /
- 正交相關檢測
Abstract: A novel power frequency electric field measurement system based on high-performance MEMS electric field sensing chips is developed. Based on cross-correlation detection principle, a power frequency electric field demodulation algorithm of MEMS sensing chips that can inhibit background interference noise is proposed. And a small-scale, high-resolution electric field measuring probe is designed. Moreover, the system overall structure scheme is designed for implementation of high-accuracy demodulation electric field signals. The test result under power lines shows that the plotted curves of the developed MEMS system are consistent with Narda EFA-300.
- Electric field sensor /
- Power-frequency electric field /
- Cross-correlation detection

HTML全文

圖 1 MEMS電場傳感器敏感芯片感應原理

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圖 2 MEMS電場敏感芯片前置放大電路

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圖 3 MEMS工頻電場測量探頭

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圖 4 MEMS工頻電場測量系統(tǒng)整體框圖

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圖 6 MEMS工頻電場測量系統(tǒng)樣機

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圖 5 信號解調(diào)軟件流程圖

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圖 7 MEMS工頻電場測量系統(tǒng)零點溫度特性曲線

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圖 9 10 kV輸電線路線下電場測試與計算曲線

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圖 8 10 kV輸電線路測試現(xiàn)場照片

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圖 11 同塔多回輸電線路電場測試曲線

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圖 10 同塔多回輸電線路照片

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表 1 MEMS工頻電場測量系統(tǒng)零點溫度特性測試數(shù)據(jù)

溫度(℃)	–40	–30	–20	–10	0	10	20	30	40	50
零點(V/m)	–1.39	–1.22	–1.13	–0.74	–1.22	–0.39	–0.04	–0.22	0.52	0.13

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表 2 10 kV輸電線路線下電場測試與計算數(shù)據(jù)

距離(m)	0	2	4	6	8	10
MEMS (V/m)	40.08	56.90	59.66	43.32	30.68	19.89
EFA-300 (V/m)	39.65	52.02	56.33	46.68	33.39	22.68
計算值(V/m)	44.0	51.6	53.4	44.8	33.6	24.3

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表 3 同塔多回輸電線路電場測試數(shù)據(jù)

距離(m)	0	2	4	6	8	10	12	14	16	18	20	22
MEMS (V/m)	401.87	401.22	418.45	416.32	456.93	511.43	549.13	575.03	552.92	460.72	369.00	361.08
EFA-300 (V/m)	397	399	406	421	454	505	549	576	546	466	368	337

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