分布式MEMS移相器橋高度與相移量的機(jī)電集成模型及應(yīng)用

王從思; 殷蕾; 李飛; 應(yīng)康; 張軼群; 王猛

doi:10.11999/JEIT170762

分布式MEMS移相器橋高度與相移量的機(jī)電集成模型及應(yīng)用

doi: 10.11999/JEIT170762 cstr: 32379.14.JEIT170762

1.
(西安電子科技大學(xué)電子裝備結(jié)構(gòu)設(shè)計(jì)教育部重點(diǎn)實(shí)驗(yàn)室西安 710071) ②(西安華為技術(shù)有限公司西安 710075) ③(南京電子技術(shù)研究所南京 210039) ④(陜西黃河集團(tuán)有限公司西安 710043)

基金項(xiàng)目:

國家自然科學(xué)基金(51522507, 51475349, 51490660)，國家973計(jì)劃項(xiàng)目(2015CB857100)，陜西省青年科技新星計(jì)劃(2016KJXX-06)，中央高校基本科研業(yè)務(wù)費(fèi)專項(xiàng)資金(JBG150409, KJXX1603, 7214479606)

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出版歷程
- 收稿日期: 2017-07-24
- 修回日期: 2018-01-22
- 刊出日期: 2018-06-19

Integrated Electromechanical Model and Applications of Bridge Height and Phase Shift in Distributed MEMS Phase Shifter

1.
(Key Laboratory of Electronic Equipment Structure Design, Ministry of Education, Xidian University, Xi&rsquo
2.
(Xi&rsquo

Funds:

The National Natural Science Foundation of China (51522507, 51475349, 51490660), The National 973 Plan of China (2015CB857100), Shaanxi Province Youth Science and Technology New Star Program (2016KJXX-06), The Special Funds for Basic Scientific Research Services in Central Colleges and Universities (JBG150409, KJXX1603, 7214479606)

摘要

摘要: 移相器是控制相控陣天線空間波束捷變的方向盤，其性能的優(yōu)良決定著相控陣天線性能的高低。微機(jī)電系統(tǒng)(MEMS)移相器優(yōu)勢(shì)明顯，但由于相控陣天線工作環(huán)境復(fù)雜，環(huán)境載荷會(huì)導(dǎo)致MEMS移相器結(jié)構(gòu)變形，進(jìn)而直接降低整個(gè)相控陣天線的性能。為此，該文研究MEMS移相器關(guān)鍵結(jié)構(gòu)參數(shù)和電性能之間的耦合關(guān)系，將復(fù)雜環(huán)境要素對(duì)物理結(jié)構(gòu)的影響傳遞到結(jié)構(gòu)參數(shù)和電參數(shù)上，推導(dǎo)出分布式MEMS移相器的機(jī)電集成模型，并利用集成模型對(duì)變形MEMS移相器進(jìn)行電性能快速評(píng)估和結(jié)構(gòu)公差計(jì)算。仿真結(jié)果說明了集成模型的有效性和工程應(yīng)用價(jià)值。
- 相控陣天線 /
- 分布式MEMS移相器 /
- 結(jié)構(gòu)變形 /
- 機(jī)電耦合
Abstract: Phase shifter is the steering wheel to control the beam direction of Phased Array Antenna (PAA), which determines the performance of the PAA. Micro Electronic Mechanical System (MEMS) phase shifter has obvious advantages for PAA, but there always exists structural deformation caused by the complex work environment and environmental load of the PAA, which has serious impact over the performance of the PAA. Therefore, the coupling between the key structural parameters of MEMS phase shifter and the electrical parameters is studied by transmitting the influence of complex environmental factors on structure of MEMS to the structural and electrical parameters. The electromechanical integrated model of distributed MEMS phase shifter is derived. Besides, the rapid performance assessment and structural tolerance of the deformed MEMS phase shifter is calculated based on the coupled model. The simulation results show the effectiveness of the coupled model and the engineering application value.
- Phased Array Antenna (PAA) /
- Distributed MEMS phase shifter /
- Structural distortion /
- Electromechanical coupling

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