基于MEMS技術(shù)的非接觸式人體靜電測(cè)量裝置

聞小龍; 彭春榮; 楊鵬飛; 陳博; 夏善紅

doi:10.11999/JEIT161190

基于MEMS技術(shù)的非接觸式人體靜電測(cè)量裝置

doi: 10.11999/JEIT161190 cstr: 32379.14.JEIT161190

2.
(中國(guó)科學(xué)院電子學(xué)研究所傳感技術(shù)聯(lián)合國(guó)家重點(diǎn)實(shí)驗(yàn)室北京 100190) ②(北京中科飛龍傳感技術(shù)有限責(zé)任公司北京 100084

基金項(xiàng)目:

國(guó)家自然科學(xué)基金(61302032, 61327810)

計(jì)量
- 文章訪問數(shù): 1806
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- 被引次數(shù): 0
出版歷程
- 收稿日期: 2016-11-04
- 修回日期: 2017-02-09
- 刊出日期: 2017-08-19

Non-contact Human Body Electrostatic Voltmeter Based on MEMS Technology

2.
(State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Science, Beijing 100190, China)

Funds:

The National Natural Science Foundation of China (61302032, 61327810)

摘要

摘要: 為解決傳統(tǒng)非接觸式靜電儀工作時(shí)振動(dòng)或旋轉(zhuǎn)部件裸露在外，無法在靜電高危區(qū)域使用，難以測(cè)量運(yùn)動(dòng)人體帶電情況等難題，該文研制出基于MEMS電場(chǎng)傳感器的非接觸式靜電測(cè)量裝置。提出一種新型檢測(cè)電極與敏感芯片相連結(jié)構(gòu)，顯著增大了電場(chǎng)感應(yīng)面積，增強(qiáng)了靈敏度。設(shè)計(jì)11個(gè)檢測(cè)電極分布式布置形成門體結(jié)構(gòu)，成功實(shí)現(xiàn)人體頭、肩、臂、手、腿、腳部位在運(yùn)動(dòng)過程中帶電情況的同時(shí)測(cè)量?；诮饘俜抡鎺щ娙梭w，提出模擬應(yīng)用現(xiàn)場(chǎng)的標(biāo)定方法，準(zhǔn)確實(shí)現(xiàn)了靜電安檢門的標(biāo)定。該靜電測(cè)量裝置具有無裸露可動(dòng)部件、安全性高、環(huán)境適應(yīng)性強(qiáng)等突出優(yōu)點(diǎn)，滿足粉塵濃度高、易燃油氣濃度高等惡劣環(huán)境下的使用需求。試驗(yàn)結(jié)果表明，該裝置測(cè)量范圍為-30~30 kV，分辨力優(yōu)于50 V，總不確定度優(yōu)于3%。
- 微機(jī)械電子系統(tǒng) /
- 電場(chǎng)傳感器 /
- 非接觸 /
- 靜電測(cè)量 /
- 靜電儀
Abstract: The vibrating or rotating parts of the traditional non-contact voltmeters are exposed, thus they can not be used in high-risk areas, and can hardly measure moving bodies. To solve the above problems, this paper develops new non-contact voltmeters based on MEMS electric field sensors. A new detecting electrode, which connects to the sensor chip, is brought out and effectively enhances the sensitivity. Eleven electrodes are placed on a door frame, and measure the charge distribution of head, shoulder, arm, hand, leg and foot at the same time. By means of a metal human body model, a new calibration method for application is proposed. The voltmeter built in this paper is accurately calibrated. The voltmeters have significant advantages, such as no exposed moving components, safety, high environmental adaptability, and therefore can be used under high dust concentration, high concentration of flammable gas and other harsh environments. Test results show that the measurement range is -30~30 kV, the volt resolution is better than 50 V, and the uncertainty is better than 3%.
- MicroElectroMechanical System (MEMS) /
- Electric field sensor /
- Non-contact /
- Electrostatic charge measurement /
- Voltmeter

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