微陣列光尋址生化傳感器系統(tǒng)性能研究
Research of properties on the bio-chemical micro-array light addressable potentiometric sensor system
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摘要: 該文介紹一種基于電解質(zhì)溶液-絕緣層-半導(dǎo)體(EIS)結(jié)構(gòu)的光、機(jī)、電一體化的微陣列光尋址電位傳感器系統(tǒng)(LAPS)。文中研討了LAPS的基本原理和微陣列光尋址電位傳感器系統(tǒng)的制造。通過實驗證明了芯片厚度、調(diào)制頻率、曲線線性度對系統(tǒng)性能的影響,獲得多種生化參數(shù)的光尋址測試結(jié)果。Abstract: This paper describes a kind of micro-array Light Addressable Potentionietric Sen-sor(LAPS) system based on the Electrolyte-Insulator-Semiconductor (EIS) structure, in which electronic technology, optical technology and mechanical technology are applied. The mecha-nism of the LAPS is investigated and a trial specimen of the LAPS is developed ? The research work finds how the thickness of the chip, the linearity of the I-V curve and frequency affect the performance of the LAPS system, and obtains testing results of urea, penicillin and pH value.
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