鉬基和鉿基上濺射碳膜的某些特性
PROPERTIES OF SPUTTERED CARBON FILMS ON Mo AND Hf SUBSTRACTES
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摘要: 微波管電極表面涂復(fù)碳膜能改善管子性能。本文介紹了采用高頻濺射熱解石墨的方法在Mo基和Hf基上形成碳膜的一些研究情況。包括碳膜的制造、成分分析,次級(jí)發(fā)射性能和熱輻射特性以及在真空系統(tǒng)中隨溫度上升釋放氣體的質(zhì)譜分析等。主要結(jié)果有:(1)復(fù)碳鉬有明顯的吸氧效應(yīng);(2)鉬、鉿上復(fù)碳后次級(jí)發(fā)射系數(shù)降為max 0.7;(3)高溫時(shí)(930℃)鉬基上的碳膜會(huì)很快消失,但鉿基上的碳膜到1050℃仍無(wú)明顯變化;(4)復(fù)碳鉬在高溫時(shí)有一定量的CH4形成。
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關(guān)鍵詞:
- 濺射碳膜; 次級(jí)發(fā)射; 質(zhì)譜分析
Abstract: The investigations of carbon films which are coated on Mo and Hf by using RF sputtering method are presented, including the preparation of carbon films, analysis of the composition of them, their secondary emission and thermal radiation properties and mass analysis of gas released from carbon coated Mo and Hf when heated in vacuum. Main results are: (1) carbon coated Mo can absorb oxygen easily as compared with carbon coated Hf; (2) the maximum secondary emission coefficient of carbon coated Mo or Hf is about 0.7; (3) the carbon coated on Mo is used up at 930℃ or so, but the carbon coated on Hf makes littlechange until 1050℃; (4) considerable amount of CH4 is formed as carbon coated Mo isheated in vacuum. -
A. Shik, C. R. K. Marrian, G. A. Haas, Appl. Sur.Sci., 24(1985), 475-487.[2]Willian Peter, J. Appl. Phys., 56(1984), 1546-1547.[3]D. Ruzic, R. Moore, D. Manos, S. Cohen, J.Vac. Sci. Tech., 20(1982), 1313-1316. -
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