熱激勵硅梁諧振器研究
STUDY OF THERMALLY EXCITED SILICON BEAM RESONATOR
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摘要: 作者利用微電子機(jī)械加工技術(shù)成功研制出用于高精度壓力傳感器的硅梁諧振器。采用熱激勵方式,測定了諧振梁的開環(huán)振動幅頻特性:室溫真空中諧振峰-3dB帶寬1.2Hz,Q值大于33000。從理論和實(shí)驗(yàn)兩方面討論了低熱激勵功率條件下激勵功率與諧振頻率的線性關(guān)系,二者符合較好。
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關(guān)鍵詞:
- 熱激勵; 硅梁; 諧振器
Abstract: A micro-machined single crystal beam resonator for high accuracy pressure sensors by utilizing Micro-ElectroMechanical System (MEMS) technology has been successfully fabricated. By means of thermal excitation, the frequency response (including amplitude and phase) of the resonator has been characterized with an open-loop frequency sweeping method. The -3dB width of resonant peak (less than 1.2Hz) corresponds a very high quality factor Q value greater than 33000 in vacuum at room-temperature. The frequency response of the resonator at different levels of excitation has been discussed theoretically and experitrientally The result shows a good linearity of frequency versus excitation power at lower excitation power, and is coincident with the theory. -
J. C. Greenwood, D. W. Sat cheil, A miniature silicon resonant pressure sensor lEE Proc-l.l988, 135(5), 369-372.[2]J. Greenwood, T. Wray, High accuracy pressure measurement with a silicon resonant sensor.Sensors and Actuators, 1993, A37-38, 82 85.[3]K. Ikeda, H. Kuwayama, T. Kobayashi, T. Watanabe, T. Nishikawa, T. Toshida. K. Harada.Silicon pressure sensor int egrat, es resonant st rain gauge on diaphragm, Sensors and Actnators .1990, A21-23, 146-150.[4]T.S.J. Lanmerink, M. Elwenspoek, J. H. J. Fhitman, Performance of thermally excited reso-nantors, Sensors and Actuat ors, 1990, A21-23, 352-356.[5]徐芝綸編著,彈性力學(xué)(下),北京,高等教育出版社,1998,第13章,55-63. -
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