微波氣體擊穿過程的模擬計(jì)算
THE SIMULATION FOR MICROWAVE PLASMA BREAKDOWN PROCESS
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摘要: 本文利用流體模型,將無外加恒定磁場的等離子體當(dāng)作各項(xiàng)同性的有耗媒質(zhì),求得圓柱腔結(jié)構(gòu)中的微波場分布。耦合電子、離子運(yùn)動(dòng)的流體方程,對微波等離子體的初始形成過程進(jìn)行了數(shù)值模擬計(jì)算。結(jié)果表明,在電離的初始階段,電子、離子密度分布與場分布同步。同時(shí),存在一關(guān)鍵電子密度。超過此密度后,微波場在表面快速衰減,氣體電離主要在表面進(jìn)行。
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關(guān)鍵詞:
- 微波; 等離子體; 流體方程; 圓柱波導(dǎo)
Abstract: Using the fluid model and making the plasma as isotropic medium, the microwave field in a cylindrical cavity is obtained. Coupled with fluid equations for the electron and ion motion, the microwave discharge courses are calculated. The results show that the density distribution of ion and electron is similar to electric field distribution. Also, a critical electron density is exist. Above this density, microwave field will damp rapidly, so the gas ionization is mainly on the surface. -
Moisan M, Zakrzewski Z. Plasma sources based on the propagation of electromagnetic surface waves J Phys. D, 1991, 24(7): 1025-1048.[2][2][3]Rakem Z, Leprince P, Marec J. Modelling of a nucrowave discharge created by a standing surface wave[J].J Phys. D.1992, 25(6):953-959[4]Hunermann L, Meyer R, et al. Excitation of an excimer laser with microwave resonator[J].SPIE.1991,1503:134-138[5]Hirch M N, Oskam H J. Gaseous Electronics. Vol. 1. New York: Academic Press, lnc. 1978, Chapter 3: 173-217. -
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