砷化鎵共面波導(dǎo)內(nèi)部微波信號(hào)的電光取樣檢測(cè)
ELECTROOPTIC SIMPLING OF INTERNAL MICROWAVE SIGNALS IN GaAsCOPLANAR WAVEGUIDES
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摘要: 本文報(bào)道了共軸反射式電光取樣系統(tǒng)。該系統(tǒng)時(shí)間分辨率不低于20ps,空間分辨率不低于3m。用它檢測(cè)了砷化鎵共面波導(dǎo)內(nèi)部的微波信號(hào)。這套系統(tǒng)將被應(yīng)用于砷化鎵高速集成電路內(nèi)部特性的在片檢測(cè)。
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關(guān)鍵詞:
- 電光取樣; 高速集成電路; 共面波導(dǎo); 在片檢測(cè); 皮秒光脈沖
Abstract: A coaxial reflection-mode electrooptic sampling system is presented. This system has a temporal resolution less than 20 ps and a spatial resolution less than 3m. The internal microwave signals in GaAs coplanar waveguides have been probed by the system. This system will be apply to on-wafer tests of internal characters of GaAs high-speed integrated circuits. -
Weingarten K J, Rodwell M J W, Bloom D M. IEEE J. of QE, 1988, QE-24(2): 198-220.[2]Weisenfeld J, M. IBM J. Res. Develop., 1990, 34(2/3): 141-161.[3]Shinagawa M, Magatsuma T. Electron[J].Lett.1990, 26(17):1341-1343[4][4][5]Nagatsuma T, Shinagawa M. Electron. Lett., 1991. 27(21): 1904-1905. -
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