采用懸掛金屬掩模制作約瑟夫遜隧道結(jié)
FABRICATION OF JOSEPHSON TUNNEL JUNCTION WITH SUSPENDED METAL MASK
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摘要: 正 1.引言 近幾年來由于約瑟夫遜隧道結(jié)在許多方面得到應(yīng)用,特別是在新一代超級電子計算機上得到了應(yīng)用,所以人們對制作小面積隧道結(jié)的技術(shù)產(chǎn)生了濃厚的興趣。制作軟金屬超導(dǎo)隧道結(jié),以IBM為代表已形成一套完整的工藝。但要用他們的辦法重復(fù)地制作出實用的隧道結(jié),必須有高級的專用設(shè)備和豐富的技術(shù)積累。一般單位在短期內(nèi)是難以達(dá)到這樣的技術(shù)水平的。1982年Gundlach(西德馬克斯-普朗克學(xué)會)發(fā)表的文章仍在使用刀片制作的金屬掩模。我們也曾經(jīng)使用過這種掩模,但是用一般形式的金屬掩模制作隧道結(jié)時,在氧化層勢壘形成以后,必須打開鍍膜機的鐘罩,以便轉(zhuǎn)換掩模制作上電極。這樣氧化層勢壘就容易受到大氣污染。 為了克服這一缺點,我們用刀片拼裝成的懸掛金屬掩模來制作隧道結(jié)。這一技術(shù)具
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關(guān)鍵詞:
Abstract: A small area Josephson tunnel junction is fabricated with suspended metai mask which is made from ordinary razor blades. The junction overlap is formed by two succeeding evaporations of susperconductor materials at oblique angles. The advantages of this technique are that the fabrieation processes ean be performed continuously without opening the evaperation chamber and also it is suitable for making a small area tunnel junction. The I-V charaeteristic of a tunnel junction made by this technique has been taken at 4.2K. -
J. H. Greiner et al., IBM J. Res. Develop., 24(1980), 195.[2]K. H. Gundlach et al., Appl. Phys. Lett., 41(1982), 294.[3]楊彩炳等,Pb-In合金sIs結(jié)的初步研究,第三次超導(dǎo)隧道效應(yīng)全國學(xué)術(shù)會議,1982.[4]G. M. Daalmans, Proc. of Second international Conference on Superconducting Quantum Interference Devices and their Applications, Berlin(West); May 6-9, 1980, p. 399, ed. by H.D. Hahlbohm and H. Lbbig.[5]J. T. C. Yeh, J.Appl. Phys. 45(1974 ), 4617.[6]G. J. Dolan, Appl. Phys. Lett., 31(1977 ), 337. -
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