DJ-2型可變矩形電子束曝光機(jī)電子光學(xué)設(shè)計(jì)
ELECTRON OPTICAL COLUMN FOR VARIABLE RECTANGULAR-SHAPED BEAM LITHOGRAPHY SYSTEM DJ-2
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摘要: 本文討論可變矩形電子束曝光機(jī)的電子光學(xué)設(shè)計(jì),著重分析光路構(gòu)成和變形偏轉(zhuǎn)補(bǔ)償?shù)葐?wèn)題。DJ-2型機(jī)使用最少的透鏡數(shù)實(shí)現(xiàn)變形束曝光機(jī)的功能要求。為實(shí)現(xiàn)高速變形偏轉(zhuǎn),采用高靈敏度串接式平板靜電偏轉(zhuǎn)器,通過(guò)精確的線性補(bǔ)償和旋轉(zhuǎn)補(bǔ)償,使靶上束斑電流密度和分辨率以及原點(diǎn)位置不受束斑尺寸改變的影響。實(shí)驗(yàn)結(jié)果表明,用發(fā)夾型鎢絲陰極時(shí)的束流密度大于0.4A/cm2;22mm掃描場(chǎng)內(nèi)邊緣分辨率優(yōu)于0.2m。
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關(guān)鍵詞:
- 電子光學(xué); 電子束曝光機(jī); 可變矩形束
Abstract: The electron optical column for variable rectangular-shaped beam lithography system DJ-2 is described, with emphasis on the analysis of optical configuration and shaping deflection compensation. In this column the variable spot shaping is performed with a minimum number of lenses by a more reasonable optical scheme. A high-sensitivity electrostatic shaping deflector with serial parallel-plates is employed for high-speed spot shaping. With the accurate linear and rotational approaches, the spot current density of over 0.4 A/cm2 is obtained, with a tungsten hairpin cathode, and the edge resolution is better than 0.2 m within 2 X 2 mm field size. -
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